1. Substrate size: 5mm to 120mm（5 inches）（Need to contact customer service about the size of the substrate sizes）
2. Speed range: 50-10000RPM
3. Human machine interface: 4.3 inch touch screen
4. Motor speed stability: ±1RPM
5. Spin coating uniformity: ±1%
6. Turn around: Can rotate forward and reverse
7. Stylus: Stylus BAMBOO resistance pen (standard)
8. Set data: Unlimited group data, each group of 10 speeds (standard)
9. Seconds per period: 0-10000s
10. Storage data: Unlimited data
11. Operating voltage (Spin Coater): AC100-250V, single phase, 50/60Hz
12. Operating voltage(Pump): AC220V(Standard) AC110V(Optional)
13. Pumping speed: ≥60L/MIN
14. Max vacuum: -85KPA
15. Sound Level: ≤55db
16. Spin coater power: 200W
17. Pump power: 350W
18. Dimensions(Spin Coater): 210mm(W)X220mm(D)X160mm(H)
19. Weight(Spin Coater): 10KG
20. Weight(Pump): 9KG
21. Relative humidity: < 85%
22. Ambient temperature: 0-40℃
23. Warranty: 1 year
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